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| ◆Lineup of 2 types that are active in multi-purpose |
| ◆Fast delivery times（Minimum 1 week）*1 |
| ◆Low cost due to no design required |
| ◆There is a tapped hole for mounting on the back side |
| ◆Compatible with all our power supplies |
*1 You need to make sure when you order from overseas. |
In response to feedback from many customers, we have released a standard electrostatic chuck. In the past, we only proposed custom-made products, but with the release of standard products, it is now possible to provide products with short delivery times and low cost. In addition, we still accept custom-made products, so please use them according to your situation.
| Surface material | resin | |
| Recommended applications | Hand for transport / Inspection stage for fixing, etc… | |
| External dimensions | W310mm×D220mm×H6mm | |
| Chucking area | W297mm×D207mm | |
| Weight | About 1.2kg | |
| Base material | A5052P | |
| Usage environment | Only in atmospheric conditions. | |
| Temperature | Room temperature (Recommended: 15~30℃) | |
| Humidity | Recommended: 30~70% | |
| Lineup | Orange | Black |
| Model No. | MM-ESC Orange-A4 | MM-ESC Black-A4 |
| Operating voltage | ～DC±1.8kV | ～DC±2.5kV |
| Max applied voltage | Max DC±2.0kV | Max DC±3.0kV |
| Recommended workpieces | Insulator (depending on material) / Conductor / Ferroelectric | Conductors / Ferroelectrics |
| Product drawings | If you wish, please contact us using the inquiry form. | |
| Orange | Black | Backside（common） |
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