Particle Collector

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New Proposals for Particle Countermeasures

“Particle Collector”

“Particles (foreign objects)” are a general term for foreign objects such as dust. Since it adversely affects various aspects such as the appearance quality, performance, and lifetime of the product, it is regarded as a natural enemy at the manufacturing site.

In the semiconductor field, with the miniaturization and sophistication of electronic devices such as personal computers, tablets, and smartphones, there is a demand for smaller, higher-quality semiconductor devices. Naturally, the circuits that determine the performance of devices are becoming more miniaturized, so particles (foreign objects) at the level of “several nanometers,” which were not considered a problem in the past, have become a major problem in recent years.

In addition, not only in the semiconductor field but also at many manufacturing sites, as factory automation accelerates, “reduction of defect rate” and “improvement of production efficiency” have been set as themes.

The “Particle Collector” proposed by Creative Technology is a tool that captures particles (foreign objects) in space and specializes in particle countermeasures by applying the “Electrostatic Chuck” technology that we have cultivated over many years in the semiconductor field.

As a new standard for particle countermeasures, it is being installed by many companies regardless of industry.

Without making big changes to the production line, you want to proceed with particle countermeasures with optional tools.

You want to promote particle countermeasures not only in the atmospheric environment but also in clean rooms and vacuum environments.

You want to prevent particles from adhering to products, reduce the defect rate in the manufacturing process, and improve production efficiency.

Image of Particle Collector

Depending on the countermeasure environment and location, we propose Particle Collectors of various materials, shapes, and principles.

In some cases, conventional technologies (magnet sheets and adhesive sheets) cannot be used to prevent fine particles.

Since it can capture particles (foreign objects) in a “non-contact”, it is also being installed in product fields that require delicacy.

Case Study

●Semiconductor, FPD, Electronic components, Battery industry, etc.

Particle countermeasures in vacuum process equipment.

Even in clean vacuum equipment, particles (foreign objects) can be stirred up during pressure fluctuations such as vacuum pumping and atmospheric exposure. The use of a Particle Collector can prevent re-deposition onto products and reduce defect rates.

Particle countermeasure in cleanroom.

In cleanroom product assembly operations, dust generation from the work process is unavoidable. However, using a Particle Collector can help maintain a clean working environment.

Particle countermeasure with additional tools.

In both atmospheric and vacuum environments, the installation of a Particle Collector typically does not require extensive modifications to the equipment.

●Automotive industry, etc.

Particle countermeasure during metal sheet forming.

During metal sheet forming processes, particles (foreign objects) are generated due to metal wear, which can damage the formed products. Using a Particle Collector can reduce the occurrence of such damage, leading to improved surface quality and product yield.

●Across industries

Further improvement in cleanliness.

By combining dust collectors, air purifiers, cleanroom air filters, etc., with Particle Collector, further improvement in cleanliness and extension of filter lifetime can be expected.


  1. Q1What particle sizes can it collect?

    For all General Use, Clean Room and Vacuum equipment product series, our particle collectors can all capture down to submicron level particles.

  2. Q2What kind of particles can it collect?

    It can collect all kinds of particles regardless of its material conductivity, such as metal, polymers and cotton dust, but not suitable for very large or/and heavy particles.

  3. Q3What are your standard dimensions?

    For general environments, ISO A3 size and A2 size are available. In addition, it can be customized within a maximum dimension of 1800 x 900 mm. We also offer clean room and vacuum compliant particle collectors.

  4. Q4What are the difference between General Use, Clean Room and Vacuum Equipment?

    For semiconductor and FPD industries, and for vacuum environments, we recommend our Clean Room and Vacuum Equipment series, respectively, as the components consist of using only industry-grade materials. For all other uses, we recommend General Use.

If you have any other general questions about electrostatic chucks, please click here.