Porous Vacuum Chuck

HOMEPorous Vacuum Chuck

Ｃｏｍｉｎｇ　Ｓｏｏｎ

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From consultation of material selection to joint product development, feel free to contact us regarding your material transport, clamping, or gripping technology needs.

+49 (0)159 0653 1595
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Electrostatic Chuck

●What is an ESC?
┣ More Detailed Chucking Principle
┣ An ESC for Semiconductor Manufacturing Machine
┗ Robot Transport (Manufacturing Automation / Labor Saving)
●Choose from Material
┣ Various Wafers
┣ Glass and Quartz
┣ Metal mesh and Metallic foil
┣ Cloth fabric, Non-woven fabric, Carbon fabric
┣ Polymer film
┣ Dust and Particles
┣ Paper and Photos
┗ Others

Products

ESC Peripheral Components
┣ DC power supply for an ESC
┗ Clamping status monitor unit (Capacitance sensor)
ESC Applied Technology
┣ Electrostatic carrier
┣ Soft Gripper
┗ Transparent ESC
Other Chucking Technologies
┣ Non-slip gripping pads (Ion Pad)
┗ Porous Vacuum Chuck
★Particle and Foreign matter countermeasures
┣ Particle Collector
┗ eRaser Disk
Equipment
┗ ZEUS ZERO

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1-11-33 Kamisakunobu, Takatsu-ku, Kawasaki, Kanagawa JAPAN
Postal Code: 213-0034

TEL:044-870-1335
FAX:044-870-1336