A New Concept: Cableless Electrostatic Chuck
Electrostatic Carrier

An electrostatic carrier is a tool that enables the cableless adhesion of workpieces, simplifying and improving the efficiency of transport processes.

Conventional electrostatic chucks work by adhering to a workpiece when voltage is applied and releasing it when the voltage is cut off. This requires the chuck to remain constantly connected to a power source during use. As a result, they may not be suitable for certain applications, such as long-distance transport, movement from atmospheric environments to vacuum chambers, or use in rotational mechanisms.

In contrast, the electrostatic carrier employs a new adhesion method that builds on the features of conventional electrostatic chucks. While it requires a connection to a power source only during the attachment or detachment of the workpiece, it does not require voltage to maintain adhesion. This allows it to operate independently of a power source. The electrostatic carrier contributes to automation, improved efficiency, and reduced running costs in processes that previously relied on double-sided tape or clamp mechanisms.

Key Features

① Constructed with Materials Proven in Vacuum Processes

The electrostatic carrier is made from the same materials used in electrostatic chucks for semiconductor manufacturing equipment. This ensures compatibility with stringent vacuum processes that demand high standards for contamination and particle management.

② Capable of Long-Term Retention

For standard adhesion targets such as silicon wafers and glass, the carrier has demonstrated continuous adhesion for over 240 hours without power supply.

③ Reusable Design

The electrostatic carrier is reusable. Even when it becomes unusable due to damage or wear, it can be repaired or regenerated, making it an environmentally friendly tool.

④ Customizable to Meet Your Needs

Like conventional electrostatic chucks, the electrostatic carrier can be custom-designed and manufactured to suit specific applications. Whether it’s shape, size, thickness, or the type of material to be adhered, we welcome your inquiries for tailored solutions.

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