DC Power Supply for Electrostatic Chuck (ESC)

HOMEDC Power Supply for Electrostatic Chuck (ESC)

Bipolar DC high voltage power supply specially developed for use and control of ESCs.

Appearance


CTPS-3KV2AF

CTPS-2KV2AS

CTPS-2KV1AL

Key Features

Alarm Feature

Safely use your ESC with this automatic power shutdown feature in your power supply in the event of chuck system failure.

Compatible models

  • CTPS-3KV2AF
  • CTPS-2KV2AS

De-chuck Assist Feature

De-chuck easier when powering off by reducing the residual static charge between the ESC and the workpiece.

Compatible models

  • CTPS-3KV2AF
  • CTPS-2KV2AS

Polarity Switching Feature

Fine tune your chucking force by having the option to switch voltage polarity applied to the ESC.

Compatible models

  • CTPS-3KV2AF
  • CTPS-2KV2AS

Warnings

Specifications

Specification CTPS-3KV2AF CTPS-2KV2AS CTPS-2KV1AL
Output Rated output: ±DC3kV/2mA
Voltage fluctuation rate: 2%
Maximum load capacity: 10,000pF		 Rated output: ±DC2kV/2mA
Voltage fluctuation rate: 5%
Maximum load capacity: 10,000pF		 Rated output: ±DC1.5 to 2.5 kV (Fixed at Factory Setting)
Output Adjustment Range 30V to 3kV 2V to 2kV Fixed at Factory Setting
Voltage Display 3kV MAX
(Displays positive polarity only)		 2kV MAX
(Displays positive polarity only)		 ―
Current Display 2mA MAX
(Displays positive polarity only)		 ― ―
External Switching Voltage setting switching: No voltage contact
Voltage setting: 0.1 to 10V or 30V to 3kV		 Voltage setting switching: No voltage contact
Voltage setting: 0 to 10V or 0 to 2kV		 ―
External Outputs Output operation signal
Alert feature signal
Voltage monitor V+: 0.1 to 10V
Voltage monitor V-: 0.1 to 10V
Current monitor A+: 0.1 to 10V
Current monitor A-: 0.1 to 10V 		Output operating signal
Alert feature signal
Voltage monitor V+: 0 to 2V
Voltage monitor V-: 0 to 2V		 ―
Alarm Feature Overvoltage warning
Overcurrent alarm
Output voltage shortage warning 		Overcurrent warning ―
De-chuck Assist Feature Reverse voltage feature
Discharge feature		 Discharge feature ―
Polarity Switching Function Manual control via front panel operation
Remote control by polarity regulation		 Manual control via front panel operation
Remote control by polarity regulation		 ―
Operating Condition For horizontal installation only
Left-side fan exhaust
Operating temperature:
0°C to 40°C (No condensation) 		For horizontal installation only
Top-side fan exhaust
Operating temperature:
0°C to 40°C (No condensation)		  
Voltage Used AC100V DC24V DC24V±20% 300mA MAX
Dimensions W480mm – 100mm – D370mm W200mm-102mm-D290mm For DC24V Type
W60mm – 29mm – D120mm
Weight Approx. 8.5kg Approx. 4.5kg Approx. 90g
Accessories Power cord
Output cable
Control connector Dsub25P
Instruction manual 		Output cable
Control connector Dsub25P
Instruction manual		 Instruction manual