DC Power Supply for Electrostatic Chuck (ESC)

HOMEDC Power Supply for Electrostatic Chuck (ESC)

Power supplies specifically designed for electrostatic chuck control, offering bipolar DC high voltage output. Multiple options are available to suit various applications.

Appearance

Key Features

Warnings

Follow our recommended usage methods for proper operation.
Carefully read the instruction manual before using this product.
The ESC control power supply is a high-voltage device and must not be used for any purpose other than its intended use.

Specifications

Model	CTPS-3KV2AF	CTPS-2KV2AS	CT-MMC-P-01
Output	Rated output: ±DC3kV/2mA Voltage fluctuation rate: 2% Maximum load capacity: 10,000pF	Rated output: ±DC2kV/2mA Voltage fluctuation rate: 5% Maximum load capacity: 10,000pF	Rated output: ±DC2kV(±0.1kv)（Factory-set fixed voltage）
Output Adjustment Range	30V to 3kV	2V to 2kV	Factory-set fixed voltage
Voltage Display	3kV MAX (Displays positive polarity output only)	2kV MAX (Displays positive polarity output only)	―
Current Display	2mA MAX (Displays positive polarity output only)	―	―
External Switching	Voltage setting mode: No voltage contact Voltage adjustment range: 0.1 to 10V or 30V to 3kV	Voltage setting mode: No voltage contact Voltage adjustment range: 0 to 10V or 0 to 2kV	―
External Outputs	Output operation signal Alert Signal Voltage monitor V+: 0.1 to 10V Voltage monitor V-: 0.1 to 10V Current monitor A+: 0.1 to 10V Current monitor A-: 0.1 to 10V	Output Operation Signal Alert Signal Voltage monitor V+: 0 to 2V Voltage monitor V-: 0 to 2V	―
Alarm Features	Overvoltage Alarm Overcurrent alarm Output Voltage Insufficient Alarm	Overcurrent Alarm	―
De-chuck Assist Feature	Reverse Voltage Application Discharge Function	Discharge Function	―
Polarity Switching Function	Manual control via front panel operation Remote control via polarity signal	Manual control via front panel operation Remote control via polarity signal	―
Operating Condition	Horizontal installation only Left-side fan exhaust Operating temperature: 0°C to 40°C (non-condensing)	Horizontal installation only Top-side fan exhaust Operating temperature: 0°C to 40°C (non-condensing)	Horizontal installation only Operating temperature: 0°C to 40°C (non-condensing)
Power Input	AC100V	DC24V	AC100V
Dimensions	W480mm – 100mm – D370mm	W200mm-102mm-D290mm	W90mm-H90mm-D50mm
Weight	Approx. 8.5kg	Approx. 4.5kg	Approx. 60g
Accessories	Power cord Output cable Control connector Dsub25P Instruction manual	Output cable Control connector Dsub25P Instruction manual	Instruction manual