Suitable for: Glass Panels and Quartz

Approximately 20 years ago, we successfully developed electrostatic chucks for glass bonding equipment used in the FPD (Flat Panel Display) industry. Since then, we have accumulated extensive experience and a proven track record in this field. Glass and quartz, being insulators, can sometimes experience residual static charge on the chuck or the material itself depending on the applied voltage. However, by carefully optimizing dielectric materials and internal electrode patterns, we can minimize these effects. From prototyping to mass production, feel free to contact us for tailored solutions.

Recommended Use

• Securely clamping workpieces during thin-film deposition processes
• Reliably transporting workpieces between atmospheric and in-situ vacuum environments

Applications Used

• Vacuum Bonding Equipment
• Inspection Stage Equipment
• Vacuum Deposition Equipment

Suitable Electrostatic Chucks

• Polyimide Etrostatic Chuck
• Cordless Electrostatic Chuck (Electrostatic Carrier)

FAQs

For any other general questions about electrostatic chucks, please click here.

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