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HOMEElectrostatic Particle Collector
A New Approach to Particle Control:
Electrostatic Particle Collector
The term “particles” generally refers to foreign substances such as dust. These contaminants can negatively impact product appearance, performance, and longevity, making them a major concern in manufacturing environments.
In the semiconductor industry, the miniaturization and enhanced functionality of electronic devices such as PCs, tablets, and smartphones have driven the demand for smaller and higher-quality semiconductor devices. Naturally, as the circuits that determine semiconductor performance become more miniaturized, particles at the “nanometer scale”—which were previously not considered an issue—have emerged as a significant challenge in recent years.
Furthermore, across various manufacturing sectors—not just in the semiconductor industry—factory automation has accelerated, making the “reduction of defect rates” and “improvement of production efficiency” key priorities.
Creative Technology’s “Electrostatic Particle Collector” is a specialized tool designed to capture airborne particles. It leverages the electrostatic chuck technology we have refined over years in the semiconductor field and adapts it specifically for particle countermeasures.
Recognized as a new standard for particle management, it is increasingly being adopted by companies across industries.
Implement particle countermeasures using optional tools without requiring major modifications to the production line.
Address particle countermeasures not only in atmospheric environments but also in clean rooms and vacuum environments.
Prevent particle adhesion to products, aiming to reduce defect rates in the manufacturing process and enhance production efficiency.
We offer Particle Collectors in a variety of materials, shapes, and operating principles tailored to different environments and locations.
Conventional technologies, such as magnet sheets and adhesive sheets, may fail to address fine particle issues in some cases.
Our non-contact approach to capturing particles makes it an ideal solution for industries where product delicacy is critical.
● Semiconductor, FPD, Electronic Components, Battery Industries, and More
Even in clean vacuum equipment, particles can be stirred up during pressure fluctuations caused by vacuum pumping or atmospheric exposure. Implementing a Particle Collector helps prevent re-deposition on products, contributing to lower defect rates.
Even in cleanroom assembly operations, dust generation from work processes is inevitable. The use of a Particle Collector can help maintain a clean and controlled working environment.
Whether in atmospheric or vacuum environments, installing a Particle Collector generally requires no significant modifications to existing equipment.
●Automotive Industry and Beyond
In metal sheet forming processes, particles caused by metal wear can scratch and damage the formed products. The implementation of a Particle Collector helps minimize scratches, improving surface quality and enhancing product yield.
●Applicable Across Industries
Combining Particle Collectors with dust collectors, air purifiers, or cleanroom air filters can further enhance cleanliness and extend the lifespan of filters.
Q1What particle sizes can it collect?
For all General Use, Clean Room and Vacuum equipment product series, our particle collectors can all capture down to submicron level particles.
Q2What kind of particles can it collect?
It can collect all kinds of particles regardless of its material conductivity, such as metal, polymers and cotton dust, but not suitable for very large or/and heavy particles.
Q3What are your standard dimensions?
For general environments, ISO A3 size and A2 size are available. In addition, it can be customized within a maximum dimension of 1800 x 900 mm. We also offer clean room and vacuum compliant particle collectors.
Q4What are the difference between General Use, Clean Room and Vacuum Equipment?
For semiconductor and FPD industries, and for vacuum environments, we recommend our Clean Room and Vacuum Equipment series, respectively, as the components consist of using only industry-grade materials. For all other uses, we recommend General Use.
If you have any other general questions about electrostatic chucks, please click here.