Ideal for use as stages in processing machines and inspection equipment, as well as for transport applications.

Porous Chuck

A porous chuck is a type of adhesion tool that uses a porous surface structure and negative pressure to hold thin materials such as wafers and glass. Also known as a “porous vacuum chuck” or “porous suction chuck,” it is widely utilized in manufacturing processes as stages in processing machines and inspection equipment, as well as suction pads for transport applications. It has become a standard tool in various manufacturing fields.

At Creative Technology, we aim to provide one-stop solutions for all adhesion-related needs. Beyond our core expertise in electrostatic chucks, we also develop, manufacture, and sell porous chucks to support diverse industrial applications.

Key Features

① Uniform Adhesion with Micron-Sized Pores

Unlike conventional vacuum chucks, which create air pathways through grooves or holes in the adhesion surface, porous chucks utilize micron-sized pores spread across the entire surface. This design enables uniform adhesion, minimizing issues such as deformation or suction marks, especially when handling thin and delicate materials. As a result, the porous chuck significantly reduces the risk of damage or defects in workpieces.

② Adhesion Without Fully Covering the Surface

Conventional vacuum chucks rely on the “pressure differential” between vacuum and atmospheric pressure, which requires all grooves or holes on the adhesion surface to be sealed. If they are not fully covered, sufficient pressure differential cannot be achieved, resulting in inadequate adhesion. This often necessitates replacing pads or chucks when the size of the workpiece changes. In contrast, porous chucks feature a densely distributed network of micron-sized pores across the entire surface, which minimizes air leakage. This allows for consistent adhesion even when the workpiece is slightly smaller than the chuck itself. We also provide tailored advice on optimal usage based on the properties of your workpieces.

③ Suitable for Wet Environments

Designed for use in processes involving liquids or when the workpiece is wet, ensuring reliable performance even in challenging conditions.

④ Customizable Design

We offer custom designs and manufacturing tailored to specific applications. Whether it’s shape, size, thickness, type of workpiece, or body materials, we are ready to provide the optimal solution. Please feel free to consult us for your specific needs.

Main Applications

・Fixing Plate-Like Workpieces During Machining

Suitable for use with surface grinders, rotary polishing machines, lapping machines, and similar equipment.

・Securing Plate-Like Workpieces or Films During Various Inspections

Ideal for use with visual inspection systems, image inspection devices, 2D measurement tools, and 3D measuring machines.

・Transporting Plate-Like Workpieces or Films

At Creative Technology, we offer a variety of innovative “adhesion technologies,” including porous chucks, electrostatic chucks, and high-friction pads like “IonPad” for gripping and anti-slip applications. We provide the most suitable adhesion tools tailored to your workpieces and applications. Beyond focusing on a single adhesion technology, we also propose hybrid solutions that combine multiple technologies. As a provider of one-stop solutions for all adhesion needs, Creative Technology is dedicated to helping customers achieve automation, labor savings, and productivity improvements. Feel free to contact us through our inquiry form for personalized advice and solutions.

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